GEM

SEMI 30

GEM defines certain behaviors of the equipment and how to use the SECS messages for that purpose.

• Handlers
  • Events
• GEM Compliance
  • State Models
  • Equipment Processing States
  • Documentation
  • Control (Operator Initiated)
  • Dynamic Event Report Configuration
  • Trace Data Collection
  • Alarm Management
  • Remote Control
  • Equipment Constants
  • Process Recipe Management
  • Material Movement
  • Equipment Terminal Services
  • Clock
  • Limits Monitoring
  • Spooling